Mixing effect on a nonequilibrium RF induction plasma

Hideya Nishiyama, Takehiko Sato, S. Ito, Takeshi Sato, S. Kamiyama

研究成果: Article査読

4 被引用数 (Scopus)

抄録

An experimental study was conducted to clarify the effect of secondary gas mixing on the thermo-fluid characteristics of a nonequilibrium RF induction plasma. The premixed argon and helium gas was introduced into a reactor to produce a RF induction plasma in a low operating pressure. It is shown that there are large effects of helium gas injection location and guide length on the plasma luminous area, operating limit of stable plasma, concentration and temperature fields of a RF induction plasma. A visualization study was also conducted to correspond to the variation of plasma configurations by premixing with helium gas.

本文言語English
ページ(範囲)433-437
ページ数5
ジャーナルHeat and Mass Transfer/Waerme- und Stoffuebertragung
36
5
DOI
出版ステータスPublished - 2000 9 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Fluid Flow and Transfer Processes

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