Mixed-Salt Enhanced Chemical Vapor Deposition of Two-Dimensional Transition Metal Dichalcogenides

Shisheng Li, Yung Chang Lin, Jinhua Hong, Bo Gao, Hong En Lim, Xu Yang, Song Liu, Yoshitaka Tateyama, Kazuhito Tsukagoshi, Yoshiki Sakuma, Kazu Suenaga, Takaaki Taniguchi

研究成果: Article査読

10 被引用数 (Scopus)


The usage of molten salts, for example, Na2MoO4and Na2WO4, has shown great success in the growth of two-dimensional (2D) transition metal dichalcogenides (TMDCs) by chemical vapor deposition (CVD). In comparison with the halide salt (i.e., NaCl, NaBr, and KI)-assisted growth (Salt 1.0), the molten salt-assisted vapor-liquid-solid growth technique (Salt 2.0) has improved the reproducibility, efficiency, and scalability of synthesizing 2D TMDCs. However, the growth of large-area MoSe2and WTe2is still quite challenging with the use of the Salt 2.0 technique. In this study, a renewed Salt 2.0 technique using mixed salts (e.g., Na2MoO4-Na2SeO3and Na2WO4-Na2TeO3) is developed for the enhanced CVD growth of 2D MoSe2and WTe2crystals with a large grain size and yield. A continuous monolayer MoSe2film with a grain size of 100-250 μm or isolated flakes up to ∼450 μm is grown on a halved 2 inch SiO2/Si wafer. Our study further confirms the synergistic effect of Na+and SeO32-in the enhanced CVD growth of the wafer-scale monolayer MoSe2film. Thus, the addition of Na2SeO3and Na2TeO3into the transition metal salts could be a general strategy for the enhanced CVD growth of many other 2D metal selenides and tellurides.

ジャーナルChemistry of Materials
出版ステータスPublished - 2021 9月 28

ASJC Scopus subject areas

  • 化学 (全般)
  • 化学工学(全般)
  • 材料化学


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