Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer

Mitsutomo Nishizawa, Hiroaki Niitsuma, Masayoshi Esashi

研究成果: Article査読

3 被引用数 (Scopus)

抄録

We have developed a miniaturized downhole seismic detector which is containing a silicon micro capacitive accelerometer. This micro accelerometer is wide band and highly sensitive, and has been developed for subsurface seismic measurement by using micro machining technique. The micro sensor is packaged in a miniaturized sonde in order to install it in a borehole. In field experiments seismic waves generated by an airgun were detected with satisfactory performance by our miniaturized downhole seismic detector.

本文言語English
ページ(範囲)1791-1793
ページ数3
ジャーナルSEG Technical Program Expanded Abstracts
19
1
DOI
出版ステータスPublished - 2000 1 1

ASJC Scopus subject areas

  • 地盤工学および土木地質学
  • 地球物理学

フィンガープリント

「Miniaturized downhole seismic detector using micromachined silicon capacitive accelerometer」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル