We have developed a miniaturized downhole seismic detector which is containing a silicon micro capacitive accelerometer. This micro accelerometer is wide band and highly sensitive, and has been developed for subsurface seismic measurement by using micro machining technique. The micro sensor is packaged in a miniaturized sonde in order to install it in a borehole. In field experiments seismic waves generated by an airgun were detected with satisfactory performance by our miniaturized downhole seismic detector.
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