Miniature piezoresistive sensor for detecting volatile organic components

Masaya Toda, Krzysztof Moorthi, Takumi Hokama, Zhuqing Wang, Mai Yamazaki, Takahito Ono

研究成果: Article査読

1 被引用数 (Scopus)


This paper reports a piezoresistive gas sensor, which detects the stress of polymer swollen due to sorption of trace gas molecules. The sensor consists of a Si-polymer composite and a Si cantilever with a piezoresistor at the support. The stress is transformed via the cantilever lateral deflection to the strain at the piezoresistor at the cantilever support. The saturation time for water signal is ca 440 s, and the response is reversible. The response rate, d(∆R/R)/dt, exhibits a maximum at 15.5 s. The ethanol and acetone signals show maxima of lower magnitude. The Fickian diffusion model with variable surface concentration of analyte represents very well the sensor response. The predicted maximum response rate is [d(∆R/R)/dt]max∝SεD1/2b1/2, where S is device sensitivity, ε, is equilibrium strain of swollen polymer, D is analyte diffusivity, and b is the rate of change of surface concentration of analyte. The response time corresponding to this maximum is tmax∝1/b. For low humidity, the observed sensitivity is S=2.2. An array of sensors, with properly selected polymer sorbents is expected to function as detector of volatile gas components in human breath and/or in atmosphere.

ジャーナルSensors and Actuators, B: Chemical
出版ステータスPublished - 2021 4 15

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学


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