Miniature Fourier transform infrared spectrometer for multi gas detection

Tatsuyuki Tanahashi, Takahito Ono

研究成果: Paper査読

抄録

Recently, micro sensors for analyzing multi-components are required in various fields. This research aims to develop a miniature Fourier transform infrared (FTIR) spectrometer for use in middle-infrared (mid-IR) range. The miniature FTIR spectrometer is designed, fabricated and evaluated. The spectrometer consists of a Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. The wishbone interferometer is composed of a rotary comb drive Si electrostatic actuator, micro three-dimensional Si corner cube mirrors and half mirror (Cr-coated ZnSe). The fabricated miniature FTIR spectrometer can operate in mid-IR range, and detection of CO2 and water in ambient atmosphere is demonstrated.

本文言語English
出版ステータスPublished - 2013
イベントSmart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013 - Amsterdam, North Holland, Netherlands
継続期間: 2013 3 132013 3 14

Conference

ConferenceSmart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013
国/地域Netherlands
CityAmsterdam, North Holland
Period13/3/1313/3/14

ASJC Scopus subject areas

  • 人工知能
  • コンピュータ ネットワークおよび通信
  • コンピュータ サイエンスの応用

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