Microstructure of LiAl5O8 and LiAlO2 films prepared by laser CVD

Chen Chi, Hirokazu Katsui, Rong Tu, Takashi Goto

研究成果: Conference contribution

抄録

α-LiAl5O8, γ-LiAlO2, α- Al2O3 and those composite films were prepared on AlN polycrystalline substrates by laser chemical vapor deposition (LCVD), and the effects of total pressure (Ptot) and the molar ratio of Li to Al (RLi/Al) on the morphology and deposition rates were investigated. The typical morphology of single-phase γ-LiAlO2 films prepared at RLi/Al > 1.0 and Ptot 400 Pa was granular, whereas γ-LiAlO2 films prepared at Ptot < 200 Pa and γ-LiAlO2-α-LiAl5O8 composite films had pyramidal grains. Single-phase α-LiAl5O8 films showed polygonally faceted morphologies. Composite films of α-LiAl 5O8 and α- Al2O3 consisted of carifllower-like and faceted grains. A single-phase γ-LiAlO2 film deposited at 200 Pa showed the maximum deposition rate of 48 □m h -1.

本文言語English
ホスト出版物のタイトルAdvanced Ceramics and Novel Processing
出版社Trans Tech Publications Ltd
ページ223-226
ページ数4
ISBN(印刷版)9783038351306
DOI
出版ステータスPublished - 2014
イベント5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013 - Wuhan, China
継続期間: 2013 12 92013 12 12

出版物シリーズ

名前Key Engineering Materials
616
ISSN(印刷版)1013-9826
ISSN(電子版)1662-9795

Other

Other5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013
CountryChina
CityWuhan
Period13/12/913/12/12

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

フィンガープリント 「Microstructure of LiAl<sub>5</sub>O<sub>8</sub> and LiAlO<sub>2</sub> films prepared by laser CVD」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

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