Microstructure modification of yttria-stabilized zirconia layers prepared by EB-PVD

Norio Yamaguchi, Kunihiko Wada, Kazushige Kimura, Hideaki Matsubara

研究成果: Article査読

34 被引用数 (Scopus)

抄録

Microstructures and texture of yttria-stabilized zirconia (YSZ) layers prepared by electron beam physical vapor deposition (EB-PVD) were investigated, addressing the effect of processing parameters. All the YSZ layers investigated in this study showed a columnar structure. However, significant differences were found in their microstructures. Morphology, porosity, and texture of the layers changed drastically by substrate manipulation during deposition. Without rotation, the layer showed a dense columnar structure with less intercolumnar gaps and obscure feather-like structures, and no preferred growth orientation. Rotation was very effective in developing feather-like structures within each column and hence increasing porosity. In addition, substrate rotation caused strong (100) texture. These results are attributed to the flux shadowing effect induced by oblique vapor incidence caused by substrate manipulation. The influence of electron beam power and substrate temperature was also investigated.

本文言語English
ページ(範囲)883-889
ページ数7
ジャーナルJournal of the Ceramic Society of Japan
111
1300
DOI
出版ステータスPublished - 2003 12

ASJC Scopus subject areas

  • セラミックおよび複合材料
  • 化学 (全般)
  • 凝縮系物理学
  • 材料化学

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