Microstructure and Electrical Properties of Ir-C Composite Films Prepared by MOCVD

Takashi Goto, Takashi Ono, Toshio Hirai

研究成果: Article査読

1 被引用数 (Scopus)


Iridium-carbon composite films were prepared by metalloorganic chemical vapor deposition (MOCVD) on yttria stabilized zirconia (YSZ) substrates using an iridium acetylacetonate precursor. The films prepared without oxygen gas addition were black-colored and contained 35 to 70vol% carbon. The carbon was amorphous surrounding iridium grains of 1 to 3 nm in diameter. The Ir-C films showed excellent electrical and catalytic properties for YSZ as a reversible electrode at less than 800K. The impedance associated with the YSZ/Ir-C interface was about 1/3 to 1/5 smaller than that of sputtered Pt electrodes at 773K. By adding a small amount of oxygen gas in the source gases, the carbon content in the films decreased significantly accompanying grain growth of Ir and degradation of electrical performance. The output current using the Ir films containing a trace of carbon (about 1mass%C) as electrodes was still four times greater than that using the Pt electrodes at 773K.

ジャーナルFuntai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
出版ステータスPublished - 1998 1

ASJC Scopus subject areas

  • 機械工学
  • 産業および生産工学
  • 金属および合金
  • 材料化学


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