Microstructural analysis of damaged layer introduced during chemo-mechanical polishing

Hideki Sako, Tamotsu Yamashita, Kentaro Tamura, Masayuki Sasaki, Masatake Nagaya, Takanori Kido, Kenji Kawata, Tomohisa Kato, Kazutoshi Kojima, Susumu Tsukimoto, Hirofumi Matsuhata, Makoto Kitabatake

    研究成果: Conference contribution

    17 被引用数 (Scopus)

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    Chemistry

    Pharmacology, Toxicology and Pharmaceutical Science

    Physics

    Material Science

    Engineering