Micropatterning of organic-inorganic hybrid film using photosensitive sol-gel system consisting of double-decker-shaped multifunctional silsesquioxane

Akira Watanabe, Tokuji Miyashita

研究成果: Article査読

17 被引用数 (Scopus)

抄録

The micropatterning of an organic-inorganic hybrid film consisting of a double-decker-shaped multifunctional silses-quioxane was achieved using a photosensitive sol-gel system containing a titanium alkoxide modified with β-diketone. Negative patterns with a high-resolution of ca. 1 μm were obtained by UV-irradiation.

本文言語English
ページ(範囲)1130-1131
ページ数2
ジャーナルChemistry Letters
35
10
DOI
出版ステータスPublished - 2006 10 5

ASJC Scopus subject areas

  • 化学 (全般)

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