Micromirror with two parallel rotation axes for external cavity diode laser

Masahiro Ishimori, Minoru Sasaki, Kazuhiro Hane

研究成果: Article査読

3 被引用数 (Scopus)

抄録

A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.

本文言語English
ページ(範囲)72-76
ページ数5
ジャーナルIEICE Transactions on Electronics
E90-C
1
DOI
出版ステータスPublished - 2007 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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