Micromachining and surface processing of the super-hard nano-polycrystalline diamond by three types of pulsed lasers

Takuo Okuchi, Hiroaki Ohfuji, Shoko Odake, Hiroyuki Kagi, Syohei Nagatomo, Mitsuru Sugata, Hitoshi Sumiya

研究成果: Article査読

51 被引用数 (Scopus)

抄録

Laser beam micromachining was applied to super-hard nano-polycrystalline diamond (NPD) synthesized by the direct conversion of graphite at high pressure and high temperature. Three types of pulsed lasers were tested: nanosecond near-infrared, nanosecond near-ultraviolet, and femtosecond near-infrared lasers. The latter two were also applied for synthetic single crystal of diamond to compare the results with those of the NPD. It was demonstrated that the nanosecond near-infrared laser was the most efficient device for rough shaping of the NPD, while the ultraviolet and femtosecond lasers give satisfactory results for precise surface finishing of it. The properties of the laser-processed surfaces were analyzed by scanning and transmission electron microscopy, laser scanning microscopy, and micro Raman spectroscopy. These analyses demonstrated that the three types of lasers play different and complementary roles, and that their combination is the best suitable solution for micromachining of the hardest diamond into any desired shapes.

本文言語English
ページ(範囲)833-842
ページ数10
ジャーナルApplied Physics A: Materials Science and Processing
96
4
DOI
出版ステータスPublished - 2009 9月
外部発表はい

ASJC Scopus subject areas

  • 化学 (全般)
  • 材料科学(全般)

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