Silicon cantilever arrays with a very small pitch for parallel AFM operations were studied. We fabricated 1x104 in eight groups and 1x30 Si probe arrays and produced a smaller pitch (15 μm) between probe tips by using Si anisotropic etching with a vertical wall shaped oxide mask. The vertical controls of Si probes were able to operate individually or in a group by integrating electrostatic actuators into the cantilevers of the probes. The fabricated Si cantilever arrays showed reasonable dynamic characteristics for the probe cantilever and reliable parallel operation of AFM.
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