Micromachined Si cantilever arrays for parallel AFM operation

Yoomin Ahn, Takahito Ono, Masayoshi Esashi

研究成果: Article査読

9 被引用数 (Scopus)

抄録

Silicon cantilever arrays with a very small pitch for parallel AFM operations were studied. We fabricated 1x104 in eight groups and 1x30 Si probe arrays and produced a smaller pitch (15 μm) between probe tips by using Si anisotropic etching with a vertical wall shaped oxide mask. The vertical controls of Si probes were able to operate individually or in a group by integrating electrostatic actuators into the cantilevers of the probes. The fabricated Si cantilever arrays showed reasonable dynamic characteristics for the probe cantilever and reliable parallel operation of AFM.

本文言語English
ページ(範囲)308-311
ページ数4
ジャーナルJournal of Mechanical Science and Technology
22
2
DOI
出版ステータスPublished - 2008 2

ASJC Scopus subject areas

  • 材料力学
  • 機械工学

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