Micromachined optical near-field bow-tie antenna probe with integrated electrostatic actuator

Takahito Ono, Kentaro Iwami, Masayoshi Esashi

研究成果: Article査読

4 被引用数 (Scopus)

抄録

A bow-tie antenna structure consisting of two opposing metal electrodes separated by a narrow gap is fabricated with an integrated electrostatic actuator to allow the gap to be narrowed further. This configuration allows the near-field localization and conversion efficiency to be optimized beyond that achievable by direct fabrication. The structure is expected to represent an excellent near-field source for high-resolution imaging with high optical transmittance. Electrostatic actuation is demonstrated in both contact- and noncontact-mode operations, and near-field imaging is successfully performed using the device in the illumination mode.

本文言語English
ページ(範囲)L445-L448
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
44
12-15
DOI
出版ステータスPublished - 2005 6 24

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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