Microfabrication of microtip on photocantilever for near-field scanning microscopy and investigation of effect of microtip shape on spatial resolution

Yuriko Tanaka, Kenji Fukuzawa, Hiroki Kuwano

研究成果: Article

10 引用 (Scopus)

抜粋

We experimentally investigated the dependence of spatial resolution on the shape of a microtip on our photocantilever, in order to improve the spatial resolution of near-field scanning optical microscopy. Two different cone angles of silicon-dioxide microtips were microfabricated by a new fabrication process. The experimental results, which indicate there is a relationship between the spatial resolution and cone angle of the microtip, were interpreted by calculations based on a simple theoretical model.

元の言語English
ページ(範囲)3547-3551
ページ数5
ジャーナルJournal of Applied Physics
83
発行部数7
DOI
出版物ステータスPublished - 1998 4 1
外部発表Yes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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