Microcrystalline diamond deposition using inert-gas curtain combustion-flame method

Toshimi Abe, Maki Suemitsu, Nobuo Miyamoto

研究成果: Article査読

6 被引用数 (Scopus)

抄録

Inert-gas curtain combustion-flame method, in which a combustion flame of oxygen/acetylene mixture is surrounded by an inert-gas (Ar and/or He) flow to prevent mixing oxygen from the air, has been developed for the deposition of microcrystalline diamond thin films. The emission spectra from the combustion flame showed reduction in the ultraviolet region with increasing inert-gas flow, indicating a suppression of the outer flame by the curtain. Highly uniform and highly dense microcrystalline films of diamonds were successfully prepared, which is understood to be caused by realization of a combustion flame with optimum radical concentrations. Morphological variations due to the choice of the inert gas have also been found.

本文言語English
ページ(範囲)206-212
ページ数7
ジャーナルJournal of Crystal Growth
143
3-4
DOI
出版ステータスPublished - 1994 10 2

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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