Microcolumnar and granular structures of TiO2 films prepared by laser CVD using Nd:YAG laser

Ming Gao, Akihiko Ito, Rong Tu, Takashi Goto

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

Microcolumar and granular TiO2 films were prepared by laser chemical vapor deposition using Nd:YAG laser. Effects of deposition temperature on phase and microstructure were investigated. Single-phase rutile TiO 2 films were prepared at 760-936 K, whereas mixtures of rutile and anatase TiO2 films were obtained at 975-1014 K. Single-phase anatase TiO2 films were prepared at 1067 K. Rutile TiO2 films prepared at 899-936 K showed feather-like microcolumnars with a pyramidal cap. Anatase TiO2 films prepared at 1067 K consisted of granular grains. Deposition rates were ranged from 3 to 50 μm h-1.

本文言語English
ホスト出版物のタイトルMaterials Integration
出版社Trans Tech Publications Ltd
ページ287-290
ページ数4
ISBN(印刷版)9783037853764
DOI
出版ステータスPublished - 2012
イベントInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011 - Sendai, Japan
継続期間: 2011 12月 12011 12月 2

出版物シリーズ

名前Key Engineering Materials
508
ISSN(印刷版)1013-9826
ISSN(電子版)1662-9795

Other

OtherInt. Symposium of GCOE: Materials Integration, in Conjunction with the 2nd Int. Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2011 and the 8th Materials Science School for Young Scientists, KINKEN-WAKATE 2011
国/地域Japan
CitySendai
Period11/12/111/12/2

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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