Micro-tip assembled metal cantilevers with Bi-directional controllability

H. Kwon, M. Nakada, Y. Hirabavashi, A. Higo, M. Ataka, H. Fujita, H. Toshiyoshi

    研究成果: Conference contribution

    抜粋

    Layered-metal micro cantilever with a micro tip was fabricated and characterized for high-density data storage device. The cantilevers were fabricated by the sequential depositions of chromium, gold, and chromium layers by sputtering with their stress and thickness controlled. The reversed sputtering technique was utilized for fine patterning of the cantilevers and hence for good uniformity of cantilever's elevation height after sacrificial release. A micro protrusion was formed at the end position of the cantilever by the newly developed contact shadow mask process. The fabricated cantilevers were driven in the upward direction by the electro thermal Joule heat, and also in the downward direction by the electrostatic force between cantilever and the silicon substrate. A series of small dots as recorded in a thin film photoresist by using the indentation of the fabricated protrusion, which showed that the cantilevers would be applied to high-density data storage devices.

    元の言語English
    ホスト出版物のタイトルTechnical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008
    ページ446-449
    ページ数4
    出版物ステータスPublished - 2008 10 1
    イベント2008 NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2008 Joint Meeting, Nanotechnology 2008 - Quebec City, QC, United States
    継続期間: 2008 6 12008 6 5

    出版物シリーズ

    名前Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008
    3

    Other

    Other2008 NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2008 Joint Meeting, Nanotechnology 2008
    United States
    Quebec City, QC
    期間08/6/108/6/5

    ASJC Scopus subject areas

    • Mechanical Engineering

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  • これを引用

    Kwon, H., Nakada, M., Hirabavashi, Y., Higo, A., Ataka, M., Fujita, H., & Toshiyoshi, H. (2008). Micro-tip assembled metal cantilevers with Bi-directional controllability. : Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008 (pp. 446-449). (Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008; 巻数 3).