Micro-scaled hydrogen gas sensors with patterned anodic titanium oxide nanotube film

Yasuo Kimura, Shota Kimura, Ryota Kojima, Mitsuo Bitoh, Munemitsu Abe, Michio Niwano

研究成果: Article査読

17 被引用数 (Scopus)

抄録

We have fabricated gas sensors with micro-scale-patterned anodic titanium oxide nanotube films formed by local anodization of titanium wires using a hybrid process between top-down (photolithography) and bottom-up (anodization) processes. We examine the response characteristics of the sensors for hydrogen gas to demonstrate that a few % of hydrogen gas in nitrogen ambient produces currents in the range of mA without special interdigitated electrodes. The sensitivity is remarkably improved by thinning the tube walls. The hybrid process is a suitable method for fabrication of micro-scaled gas sensors, which has useful features such as low power consumption, high reliability and portability.

本文言語English
ページ(範囲)1156-1160
ページ数5
ジャーナルSensors and Actuators, B: Chemical
177
DOI
出版ステータスPublished - 2013

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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