@inproceedings{d5014101336440889805cedc46fa9315,
title = "Micro-mirrors connected in series for loss-mechanism study and low-voltage operation",
abstract = "Micro mirrors connected in series are fabricated and studied for investigating loss mechanism of rotation hinge. Three identical mirrors (center-mirror and side-mirrors) are connected by torsion bars but the torsion bars of the center-mirror are not connected to supporting points of substrate. The other sides of torsion bars of the side-mirrors are fixed to the supporting points of substrate. Since the motions of the series-mirrors are identical to a single mirror in a specific rotational mode, the loss by the supporting points is estimated by comparing their Q factors in vacuum. The Q factor of the series-mirrors is higher by about two orders than that of the single mirror. The energy loss by the supporting points is estimated. The operation voltage of the comb-drive mirror under the resonant condition in vacuum can be decreased by suppressing the loss by the supporting points although the air friction loss is dominant.",
keywords = "Micro-mirror, energy loss, mechanical coupling",
author = "S. Kotani and Chu, {H. M.} and Takashi Sasaki and Kazuhiro Hane",
year = "2011",
month = sep,
day = "1",
doi = "10.1109/TRANSDUCERS.2011.5969711",
language = "English",
isbn = "9781457701573",
series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
pages = "554--557",
booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",
}