Micro-mirrors connected in series for loss-mechanism study and low-voltage operation

S. Kotani, H. M. Chu, Takashi Sasaki, Kazuhiro Hane

研究成果: Conference contribution

抄録

Micro mirrors connected in series are fabricated and studied for investigating loss mechanism of rotation hinge. Three identical mirrors (center-mirror and side-mirrors) are connected by torsion bars but the torsion bars of the center-mirror are not connected to supporting points of substrate. The other sides of torsion bars of the side-mirrors are fixed to the supporting points of substrate. Since the motions of the series-mirrors are identical to a single mirror in a specific rotational mode, the loss by the supporting points is estimated by comparing their Q factors in vacuum. The Q factor of the series-mirrors is higher by about two orders than that of the single mirror. The energy loss by the supporting points is estimated. The operation voltage of the comb-drive mirror under the resonant condition in vacuum can be decreased by suppressing the loss by the supporting points although the air friction loss is dominant.

本文言語English
ホスト出版物のタイトル2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
ページ554-557
ページ数4
DOI
出版ステータスPublished - 2011 9月 1
イベント2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
継続期間: 2011 6月 52011 6月 9

出版物シリーズ

名前2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
国/地域China
CityBeijing
Period11/6/511/6/9

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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