Micro-machined micro ion source for flexible and concurrent process

S. Tamonoki, H. Kuwano, S. Nagasawa

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

In this paper a micro-machined micro ion source using B.K. (Barkhausen-Kurz) oscillation discharge to realize a high ion current is developed for flexible and concurrent MEMS processes. An ion beam with several μA from the micro ion source unit having φ1mmx4.37 mm discharge space was successfully generated.

本文言語English
ホスト出版物のタイトルMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
ページ371-374
ページ数4
DOI
出版ステータスPublished - 2008 8 29
イベント21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
継続期間: 2008 1 132008 1 17

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CountryUnited States
CityTucson, AZ
Period08/1/1308/1/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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