Micro flow sensor and integrated magnetic oxygen sensor using it

Masayoshi Esashi

研究成果: Conference contribution

13 引用 (Scopus)

抜粋

A thermal micro mass flow sensor was developed. A micro bridge heater was fabricated by micromachining. The sensor has high sensitivity and quick response because of its small thermal capacity and small thermal time constant. Micro bridge differential heaters were used to detect mass flow in a small flow range. An integrated magnetic oxygen sensor was fabricated using the micro thermal flow sensor. The flow sensor and the micro valve will be applied in integrated gas control systems.

元の言語English
ホスト出版物のタイトルTransducers '91
出版者Publ by IEEE
ページ34-37
ページ数4
ISBN(印刷物)0879425857
出版物ステータスPublished - 1991 12 1
イベント1991 International Conference on Solid-State Sensors and Actuators - San Francisco, CA, USA
継続期間: 1991 6 241991 6 28

出版物シリーズ

名前Transducers '91

Other

Other1991 International Conference on Solid-State Sensors and Actuators
San Francisco, CA, USA
期間91/6/2491/6/28

ASJC Scopus subject areas

  • Engineering(all)

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  • これを引用

    Esashi, M. (1991). Micro flow sensor and integrated magnetic oxygen sensor using it. : Transducers '91 (pp. 34-37). (Transducers '91). Publ by IEEE.