Metallic Glass

Parmanand Sharma, Akihisa Inoue

研究成果: Chapter

4 被引用数 (Scopus)

抄録

This chapter describes the development of nanotechnology as an emerging frontier in future devices. Nanofabrication aims at building nanoscale structures, which can be adopted in large quantity with low costs. Micro and/or nanoelectromechanical systems are the basis of nanotechnologies as they combine miniature sensors with electronics. Lesson gives a brief idea on glassy amorphous metals which is a metallic material with disordered atomic scale structures. Their combined features of alloy and atomic configurations enabled many characters, which have not been obtained for conventional crystalline materials. The microfabrication abilities, as well as the nanoforming abilities of BMGs are described. This chapter explains the applications of BMGs and MEMs. BMGs have interesting mechanical, chemical, and functional properties, which helps a great deal in the fabrication of MEMs devices. The micro/nanofabrication ability of glassy thin films are also explained. The testing of nanoscale patterning ability of thin films is illustrated with appropriate examples. As the pattern size decreases, cost and complications involved in obtaining the nanostructure also increases and this results in the invention of several techniques for delineating patterns. This is explained with the help of many new methods used in this field.

本文言語English
ホスト出版物のタイトルHandbook of Silicon Based MEMS Materials and Technologies
出版社Elsevier Inc.
ページ447-472
ページ数26
ISBN(印刷版)9780815515944
DOI
出版ステータスPublished - 2010

ASJC Scopus subject areas

  • 材料科学(全般)

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