This chapter describes the development of nanotechnology as an emerging frontier in future devices. Nanofabrication aims at building nanoscale structures, which can be adopted in large quantity with low costs. Micro and/or nanoelectromechanical systems are the basis of nanotechnologies as they combine miniature sensors with electronics. Lesson gives a brief idea on glassy amorphous metals which is a metallic material with disordered atomic scale structures. Their combined features of alloy and atomic configurations enabled many characters, which have not been obtained for conventional crystalline materials. The microfabrication abilities, as well as the nanoforming abilities of BMGs are described. This chapter explains the applications of BMGs and MEMs. BMGs have interesting mechanical, chemical, and functional properties, which helps a great deal in the fabrication of MEMs devices. The micro/nanofabrication ability of glassy thin films are also explained. The testing of nanoscale patterning ability of thin films is illustrated with appropriate examples. As the pattern size decreases, cost and complications involved in obtaining the nanostructure also increases and this results in the invention of several techniques for delineating patterns. This is explained with the help of many new methods used in this field.
|ホスト出版物のタイトル||Handbook of Silicon Based MEMS Materials and Technologies|
|出版ステータス||Published - 2010|
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