MEMS-based X-ray optics for future astronomical missions

Yuichiro Ezoe, Ikuyuki Mitsuishi, Kensuke Ishizu, Teppei Moriyama, Kazuhisa Mitsuda, Noriko Y. Yamasaki, Takaya Ohashi, Mitsuhiro Horade, Susumu Sugiyama, Raul E. Riveros, Taylor Boggs, Hitomi Yamaguchi, Yoshiaki Kanamori, Nicholas T. Gabriel, Joseph J. Talghader, Kohei Morishita, Kazuo Nakajima, Ryutaro Maeda

研究成果: Conference contribution

抄録

X-ray optics based on MEMS technologies can provide future astronomical missions with ultra light-weight and high-performance optical systems. Curvilinear micropores vertical to a thin wafer are made by using DRIE (Deep Reactive Ion Etching) or X-ray LIGA. The side walls are smoothed by using magnetic field assisted finishing and annealing technologies in order that the walls can reflect X-rays. Two or four such wafers are bent to spherical shapes with different curvature of radii and stacked, to focus parallel X-rays from astronomical objects by multiple reflections. In this paper, the concept and recent advances of the MEMS X-ray optics are reviewed.

本文言語English
ホスト出版物のタイトル2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
ページ191-192
ページ数2
DOI
出版ステータスPublished - 2010
イベント2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan
継続期間: 2010 8 92010 8 12

出版物シリーズ

名前2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

Other

Other2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
CountryJapan
CitySapporo
Period10/8/910/8/12

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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