MEMS-based thin palladium membrane microreactors

S. Y. Ye, S. Tanaka, M. Esashi, S. Hamakawa, T. Hanaoka, F. Mizukami

研究成果: Conference article査読

2 被引用数 (Scopus)


We microfabricated a MEMS (Micro Electro Mechanical System) based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The membranes were characterized by permeation experiments with hydrogen, nitrogen, and helium at temperature ranging from 200°C to 250°C. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m-2 s-1 at 250°C and a partial pressure difference of 110 kPa. H2/N2 and H2/He selectivity was about 46 and 10 at 250°C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS. We also carried out the hydrogenation of 1-butene at 250°C using the developed microreactor. The results of long term test of about three months suggest that Pd membrane microreactor has a potential to be used in practical applications.

ジャーナルProceedings of SPIE - The International Society for Optical Engineering
出版ステータスPublished - 2006 3 31
イベントICO20: MEMS, MOEMS, and NEMS - Changchun, China
継続期間: 2005 8 212005 8 26

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学


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