Membrane-Heater-Integrated LSI for On-Site Annealing-Recovery from 20 KGY Gamma Ray Irradiation Damage

Tianjiao Gong, Yukio Suzuki, Akinori Takeyama, Takeshi Ohshima, Shuji Tanaka

研究成果: Conference contribution

抄録

In this study, we proposed a novel membrane-heater-integrated LSI for on-site annealing-recovery from TID effect with low energy consumption, aiming at solving the problem of IC damage by gamma ray irradiation. The heater and membrane structure were fabricated around the LSI by using integrated MEMS technology. 20 kGy gamma-ray irradiation was performed later on the LSI samples and then the irradiated samples were annealed for recovery by integrated membrane-heater. It was found that the current of LSI decreased after irradiation and almost recovered to the original level after 15-minutes annealing at 300 °C. We report, for the first time, the successful recovery of LSI with 15 minutes from 20 kGy gamma-ray TID damage by using an integrated membrane-heater.

本文言語English
ホスト出版物のタイトル34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
出版社Institute of Electrical and Electronics Engineers Inc.
ページ1051-1054
ページ数4
ISBN(電子版)9781665419123
DOI
出版ステータスPublished - 2021 1 25
イベント34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States
継続期間: 2021 1 252021 1 29

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2021-January
ISSN(印刷版)1084-6999

Conference

Conference34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
国/地域United States
CityVirtual, Gainesville
Period21/1/2521/1/29

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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