Mechanical-contact-based submicron-si-waveguide optical microswitch at telecommunication wavelengths

E. Bulgan, Y. Kanamori, K. Hane

研究成果: Conference contribution

抄録

We report a mechanical-contact-based single-input single-output normally-closed optical microswitch. The switch comprises an input and an identical output waveguide, and a movable low-loss elliptical waveguide driven by a miniature electrostatic comb drive. Movable waveguide closes the lateral gap between input and output waveguides. Mechanical contact of waveguide tip surfaces enables light propagation from the input to the output waveguide through movable elliptical waveguide. Optical property of the switch is studied by Finite Difference Time Domain (FDTD) Analysis. An SOI wafer with 260 nm-thick device-Si and 2 μm-thick buried-oxide layers is utilized in the fabrication. TE-polarized near infrared light at 1.55 μm wavelength is coupled into the input waveguide through an IR objective lens in free-space, and switch is observed with the help of a vidicon camera. Approximately 30±2 dB switching contrast is obtained experimentally at 540 nm lateral switch motion between on and off states.

本文言語English
ホスト出版物のタイトル2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
ページ93-94
ページ数2
DOI
出版ステータスPublished - 2007 12 1
イベント2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China
継続期間: 2007 8 122007 8 16

出版物シリーズ

名前2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Other

Other2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
国/地域Taiwan, Province of China
CityHualien
Period07/8/1207/8/16

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 電子工学および電気工学

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