Measurements of nonlinear dielectric constants of Pb(Zr,Ti)O3 thin films using a dynamic measuring method

研究成果: Article査読

3 被引用数 (Scopus)

抄録

The nonlinear dielectric constants of Pb(Zr,Ti)O3 (PZT) thin films were studied using a dynamic measuring method. The {111}-oriented PZT thin films with various Zr/Ti ratios were deposited on platinum-coated silicon substrates using a sol-gel method. The ε333 of the films increased with the Zr concentration in the tetragonal region and reached a maximum value of 280 aF/V close to the morphotropic phase boundary (Zr/Ti = 52/48). This measured value is 400 times larger than that of LiTaO3 single crystals.

本文言語English
論文番号09KA08
ジャーナルJapanese journal of applied physics
52
9 PART2
DOI
出版ステータスPublished - 2013 9

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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