Measurement of micrometer order displacement using phase-shift type ultrasonic correlation system in MHz range

Kazuhiko Imano, Hiroshi Inoue

    研究成果: Article査読

    7 被引用数 (Scopus)

    抄録

    The ultrasonic correlation system was improved to detect a displacement which is much smaller than the wave length of sound, by shifting the phase of the reference wave with respect to the acoustic signal. To investigate the range resolution of the new system, micrometer order displacement was measured using MHz-range ultrasonic waves. Results obtained using the new system show good agreement with the values set by the precision micrometer stage. Range resolution better than λ/300 (1 μm) has been achieved. As an application of the system, the surface topography was also investigated using a 5 MHz focused ultrasonic transducer in the 2-dimensional scanning mode. Surface displacement smaller than λ/10 was successfully imaged.

    本文言語English
    ページ(範囲)3177-3179
    ページ数3
    ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    35
    5 B
    出版ステータスPublished - 1996 12 1

    ASJC Scopus subject areas

    • 工学(全般)
    • 物理学および天文学(全般)

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