Meandering coplanar line type thin film magnetic field sensor with direct bias

Shin Yabukami, Heroaki Uetake, Kenta Moriya, Tsuyoshi Tominami, Hidehiko Onodera

研究成果: Article査読

抄録

We propose a new simple method to directly apply dc current to the CoNbZr/Cu film of a sensor. A very sensitive thin film sensor was developed using a meandering coplanar line with biasing conductors fabricated from SrTiO film (0.75 μm thick), amorphous Co85Nb12Zr3 film (1.0 mm × 2.45 mm, 1 μm thick) and Cu/Cr film (2 μm/0.1 μm). We discuss direct bias to CoNbZr film and Cu film under a CoNbZr film and compare it with an application of bias magnetic field. Good sensitivity (phase change over 100 degrees/Oe) was obtained by the proposed method.

本文言語English
ページ(範囲)460-465
ページ数6
ジャーナルIEEJ Transactions on Fundamentals and Materials
137
8
DOI
出版ステータスPublished - 2017 1 1
外部発表はい

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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