Magnetostrictive performance of electrodeposited TbxDy(1-x)Fey thin film with microcantilever structures

研究成果: Article査読

1 被引用数 (Scopus)

抄録

The microfabrication with a magnetostrictive TbxDy(1-x)Fey thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbxDy(1-x)Fey is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb0.36Dy0.64Fe1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.

本文言語English
論文番号523
ジャーナルMicromachines
11
5
DOI
出版ステータスPublished - 2020 5 1

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学

フィンガープリント

「Magnetostrictive performance of electrodeposited Tb<sub>x</sub>Dy<sub>(1-x)</sub>Fe<sub>y</sub> thin film with microcantilever structures」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル