Magnetocaloric cooling of a thermally-isolated microstructure

研究成果: Article査読

10 被引用数 (Scopus)

抄録

A solid-state micro magnetic refrigerator (SSMMR) has some advantages to cool microdevices because of its high efficiency and simple structure. In this study, we demonstrated the actual cooling of a thermally-isolated microstructure, which is a main component of the SSMMR, by the magnetocaloric effect. The thermal isolation structure is composed of parylene high-aspect-ratio beams for both high thermal isolation and high stiffness. A magnetic field switch was designed and fabricated to control the magnetic flux density from 0 T to about 1 T. Under this magnetic flux density change, the maximum temperature change of 1.0°C was confirmed.

本文言語English
論文番号094008
ジャーナルJournal of Micromechanics and Microengineering
22
9
DOI
出版ステータスPublished - 2012 9

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 材料力学
  • 機械工学
  • 電子工学および電気工学

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