TY - JOUR
T1 - Magnetocaloric cooling of a thermally-isolated microstructure
AU - Tsukamoto, Takashiro
AU - Esashi, Masayoshi
AU - Tanaka, Shuji
PY - 2012/9
Y1 - 2012/9
N2 - A solid-state micro magnetic refrigerator (SSMMR) has some advantages to cool microdevices because of its high efficiency and simple structure. In this study, we demonstrated the actual cooling of a thermally-isolated microstructure, which is a main component of the SSMMR, by the magnetocaloric effect. The thermal isolation structure is composed of parylene high-aspect-ratio beams for both high thermal isolation and high stiffness. A magnetic field switch was designed and fabricated to control the magnetic flux density from 0 T to about 1 T. Under this magnetic flux density change, the maximum temperature change of 1.0°C was confirmed.
AB - A solid-state micro magnetic refrigerator (SSMMR) has some advantages to cool microdevices because of its high efficiency and simple structure. In this study, we demonstrated the actual cooling of a thermally-isolated microstructure, which is a main component of the SSMMR, by the magnetocaloric effect. The thermal isolation structure is composed of parylene high-aspect-ratio beams for both high thermal isolation and high stiffness. A magnetic field switch was designed and fabricated to control the magnetic flux density from 0 T to about 1 T. Under this magnetic flux density change, the maximum temperature change of 1.0°C was confirmed.
UR - http://www.scopus.com/inward/record.url?scp=84866330684&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84866330684&partnerID=8YFLogxK
U2 - 10.1088/0960-1317/22/9/094008
DO - 10.1088/0960-1317/22/9/094008
M3 - Article
AN - SCOPUS:84866330684
VL - 22
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
SN - 0960-1317
IS - 9
M1 - 094008
ER -