Magnetic torque driving 2D micro scanner with a non-resonant large scan angle

Wataru Makishi, Yusuke Kawai, Masayoshi Esashi

研究成果: Article査読

4 被引用数 (Scopus)

抄録

In this paper, a non-resonant 2D micro optical scanner with extremely large optical scan angle has been reported for wide field of view in a LASER application. Two pairs of permanent magnets are mounted on the Si mirror and supporting gimbal structure, respectively, to generate large tilting angle without a thermal degradation of the driving property. The scanner can be driven in two- axis independently by a rotational magnetic torque using orthogonal oriented external electromagnets. The maximum optical scan-angle of 118 degree has been achieved with applying 120mA to the electromagnet.

本文言語English
ページ(範囲)135-136
ページ数2
ジャーナルIEEJ Transactions on Sensors and Micromachines
130
4
DOI
出版ステータスPublished - 2010

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

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