Magnetic rf integrated thin-film inductors

M. Yamaguchi, M. Baba, K. Suezawa, T. Moizumi, K. I. Arai, Y. Shimada, A. Haga, S. Tanabe, K. Ito

研究成果: Article査読

14 被引用数 (Scopus)

抄録

The magnetic thin film inductor with 4-tun, 337×337μm2 size spiral coil showed inductance 21% larger than the air core's while its quality factor was lower than the air core's. Keeping the similar quality factor as the air core, the micro patterned magnetic film inductor showed 11% inductance enhancement. The proposed inductor can be made on the passivation of integrated semiconductor devices.

本文言語English
ページ(範囲)205-208
ページ数4
ジャーナルIEEE MTT-S International Microwave Symposium Digest
1
DOI
出版ステータスPublished - 2000 1 1

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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