Magnetic properties of FeRh alloy films prepared by ion-beam sputtering

S. Hashi, S. Yanase, Y. Okazaki, M. Inoue

研究成果: Conference contribution

抜粋

The interesting features of equiatomic FeRh alloy with a magnetic phase transition exhibited around room temperature are very useful for micro electrical mechanical system (MEMS) devices. A few studies have been made for the preparation of the ordered FeRh thin films, and they succeeded in the preparation of well-defined films. However, the FeRh films have not been employed in any engineering applications. This is simply because such a sharp transition can only be realized with special conditions: the films deposited on quartz substrates should be annealed in vacuum at 1200°C, or a special substrate such as an MgO single crystal is required. The purpose of this study is the reduction of post annealing temperature to obtain the ordered structure and a relatively sharp magnetic transition on conventional glass or silicon wafer substrates, by using ion-beam sputtering.

元の言語English
ホスト出版物のタイトルINTERMAG Europe 2002 - IEEE International Magnetics Conference
編集者J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood
出版者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)0780373650, 9780780373655
DOI
出版物ステータスPublished - 2002 1 1
外部発表Yes
イベント2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands
継続期間: 2002 4 282002 5 2

出版物シリーズ

名前INTERMAG Europe 2002 - IEEE International Magnetics Conference

Other

Other2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
Netherlands
Amsterdam
期間02/4/2802/5/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Surfaces, Coatings and Films

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  • これを引用

    Hashi, S., Yanase, S., Okazaki, Y., & Inoue, M. (2002). Magnetic properties of FeRh alloy films prepared by ion-beam sputtering. : J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, J. De Boeck, & R. Wood (版), INTERMAG Europe 2002 - IEEE International Magnetics Conference [1000965] (INTERMAG Europe 2002 - IEEE International Magnetics Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INTMAG.2002.1000965