Magnetic micro-actuator

K. Yanagisawa, A. Tago, T. Ohkubo, H. Kuwano

研究成果: Conference contribution

27 引用 (Scopus)

抜粋

The characteristics of three types of magnetic microactuators made by silicon-based microfabrication are described. The microfabrication, actuator configuration, and dynamic characteristics of a fabricated microactuator with a planar coil are examined. This microactuator is shown to operate in the nanometer range. It has a conical soft-magnetic tip 10 microns high with a one-turn copper coil. This actuator will be applied to microvalves, micropumps, and microsyringes.

元の言語English
ホスト出版物のタイトルProceedings. IEEE Micro Electro Mechanical Systems
出版者Publ by IEEE
ページ120-124
ページ数5
ISBN(印刷物)0879426411
出版物ステータスPublished - 1991 1 1
外部発表Yes
イベントProceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91 - Nara, Jpn
継続期間: 1991 1 301991 2 2

出版物シリーズ

名前Proceedings. IEEE Micro Electro Mechanical Systems

Other

OtherProceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91
Nara, Jpn
期間91/1/3091/2/2

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

フィンガープリント Magnetic micro-actuator' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用

    Yanagisawa, K., Tago, A., Ohkubo, T., & Kuwano, H. (1991). Magnetic micro-actuator. : Proceedings. IEEE Micro Electro Mechanical Systems (pp. 120-124). (Proceedings. IEEE Micro Electro Mechanical Systems). Publ by IEEE.