Low-temperature recrystallization of ferroelectric lead zirconate titanate thin films on glass substrate using continuous-wave green laser

Shin Ichiro Kuroki, Kiichiro Tago, Koji Kotani, Takashi Ito

研究成果: Article査読

3 被引用数 (Scopus)

抄録

A continuous-wave (CW) green laser with the wavelength of 532nm was employed to crystallize lead zirconate titanate (PZT) films on glass substrates. The firing was local and instantaneous, and annealing time (10 -5-10-1 s) was controlled by adjusting the laser scanning speed. After CW green laser annealing, three typical crystallization modes of the PZT thin films were observed, that is, microcrystallization, island crystallization, and lateral crystallization. In the island crystal region, the PZT film was crystallized uniformly and sufficiently over the thin films, and the ferroelectric perovskite c-axis (001) was dominant. In this region the remanent polarization of 13 μC/cm2 was achieved.

本文言語English
論文番号04C142
ジャーナルJapanese journal of applied physics
48
4 PART 2
DOI
出版ステータスPublished - 2009 4 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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