Low temperature processing of crystalline lead zirconate titanate (PZT) film and the direct micropatterning by laser-induced pyrolysis of a sol-gel-derived film

Akira Watanabe, Tomokazu Tanase, Yoshio Kobayashi, Mikio Konno, Shinji Yamada, Takao Miwa

研究成果: Letter査読

16 被引用数 (Scopus)

抄録

A novel low-temperature processing of crystalline lead zirconate titanate (PZT) film was developed. The beam from an Ar ion laser was focused and scanned on the sol-gel derived film, and it induced pyrolysis of the precursor film with spatially selectivity. Development of the film using an acidic solution gave the PZT micropattern. The Raman spectrum of the micropattern exhibited the characteristics of crystalline PZT.

本文言語English
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
42
7 B
出版ステータスPublished - 2003 7月 15

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(その他)
  • 物理学および天文学(全般)

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