A novel low-temperature processing of crystalline lead zirconate titanate (PZT) film was developed. The beam from an Ar ion laser was focused and scanned on the sol-gel derived film, and it induced pyrolysis of the precursor film with spatially selectivity. Development of the film using an acidic solution gave the PZT micropattern. The Raman spectrum of the micropattern exhibited the characteristics of crystalline PZT.
|ジャーナル||Japanese Journal of Applied Physics, Part 2: Letters|
|出版ステータス||Published - 2003 7月 15|
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