Low-temperature chemical vapor deposition of YBa2Cu3Ox films

Hideaki Zama; Shunri Oda; Takayuki Miyake; Takeo Hattori

doi:10.1016/0921-4534(91)91176-5

Low-temperature chemical vapor deposition of YBa₂Cu₃O_x films

Hideaki Zama, Shunri Oda, Takayuki Miyake, Takeo Hattori

研究成果: Article › 査読

2 被引用数 (Scopus)

抄録

Low-temperature growth of YBa₂Cu₃O_x films by CVD has been investigated using Y (DPM)₃, Ba (DPM)₂ and Cu (DPM)₂ as starting materials and N₂O as an oxidizing agent. 123-perovskite structure has been prepared at a substrate temperature of 530°C. Superconducting films with zero-resistivity T_c of 15K and T_onset=87K has been obtained at T_sub=610°C and T_c=83K, T_onset=89K at T_sub=650°C. A 254nm-light has promoted decomposition of β-diketonate complex at T_sub=215°C.

本文言語	English
ページ（範囲）	2103-2104
ページ数	2
ジャーナル	Physica C: Superconductivity and its applications
巻	185-189
号	PART 3
DOI	https://doi.org/10.1016/0921-4534(91)91176-5
出版ステータス	Published - 1991 12 1

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

文献へのアクセス

10.1016/0921-4534(91)91176-5

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引用スタイル

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abstract = "Low-temperature growth of YBa2Cu3Ox films by CVD has been investigated using Y (DPM)3, Ba (DPM)2 and Cu (DPM)2 as starting materials and N2O as an oxidizing agent. 123-perovskite structure has been prepared at a substrate temperature of 530°C. Superconducting films with zero-resistivity Tc of 15K and Tonset=87K has been obtained at Tsub=610°C and Tc=83K, Tonset=89K at Tsub=650°C. A 254nm-light has promoted decomposition of β-diketonate complex at Tsub=215°C.",

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AB - Low-temperature growth of YBa2Cu3Ox films by CVD has been investigated using Y (DPM)3, Ba (DPM)2 and Cu (DPM)2 as starting materials and N2O as an oxidizing agent. 123-perovskite structure has been prepared at a substrate temperature of 530°C. Superconducting films with zero-resistivity Tc of 15K and Tonset=87K has been obtained at Tsub=610°C and Tc=83K, Tonset=89K at Tsub=650°C. A 254nm-light has promoted decomposition of β-diketonate complex at Tsub=215°C.

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