Low loss laminated polarization splitters for wavelengths longer than 1.3 μm prepared by plasma enhanced chemical vapor deposition

Yong Gi Lee, Takayuki Kawashima, Osamu Hanaizumi, Isao Takahashi, Jun Ichi Murota, Shojiro Kawakami

研究成果: Article査読

抄録

We have decreased remarkably the insertion loss of a laminated polarization splitter (LPS) designed for wavelengths longer than 1.3 μm, which consists of a-SiC:H/SiO2 multilayers prepared by plasma enhanced chemical vapor deposition. Previously fabricated LPSs have the problem of a large scattering loss because the surface of the multilayer film is not sufficiently flat; this is especially remarkable in the SiO2 film. The flatness of the SiO2 film is improved by optimization of the substrate temperature and flow rate of the source gases. The a-SiC:H film with a high refractive index and low absorption is obtained by optimizing the mixing of source gases at fixed substrate temperature. The total loss of a multilayer film at normal incidence is decreased from 1.22 × 10-2 dB μm-1 (previous work) to 1.4 × 10-3 dB μm-1. The insertion loss of the LPS is also decreased from 5.2 × 10-2 dB μm-1 (previous work) to 7 × 10-3 dB μm-1.

本文言語English
ページ(範囲)179-183
ページ数5
ジャーナルThin Solid Films
292
1-2
DOI
出版ステータスPublished - 1997 1 5

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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