Low-k PZT film for commercial use

Mario Kiuchi, Ryoma Miyake, Shinya Yoshida, Shuji Tanaka, Tsuyoshi Takemoto, Yukitaka Yamaguchi, Kenji Komaki

研究成果: Conference contribution

抄録

Monocrystalline-like epitaxial PZT films for commercial use are described for piezoelectric MEMS applications. Films at the morphotropic phase boundary (MPB) with a thickness of 1 µm to 2 µm exhibit a typical transverse piezoelectric d31 coefficient of -185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. The figure-of-merit for MEMS device is more than 50 GPa. These films are commercially available for piezoelectric MEMS device development and production.

本文言語English
ホスト出版物のタイトルIUS 2020 - International Ultrasonics Symposium, Proceedings
出版社IEEE Computer Society
ISBN(電子版)9781728154480
DOI
出版ステータスPublished - 2020 9 7
イベント2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
継続期間: 2020 9 72020 9 11

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2020-September
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
国/地域United States
CityLas Vegas
Period20/9/720/9/11

ASJC Scopus subject areas

  • 音響学および超音波学

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