Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactor

研究成果: Conference contribution

2 引用 (Scopus)

抜粋

We demonstrated considerable reduction of thermal contact resistance (TCR) in microscale using carbon nanotubes (CNTs), and applied this technology to a micro thermal switch for magnetic refrigeration. A micro thermal contactor with a PECVD-grown 10 μm long "CNT carpet" shows a TCR of ca. 600 mm2K/W at a contact pressure of 20 kPa. The reliability of this data was confirmed by the extrapolation of published data in macroscale based on an empirical equation. The Off/On thermal resistance ratio of the thermal switch was ca. 7.3.

元の言語English
ホスト出版物のタイトルTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ1489-1492
ページ数4
DOI
出版物ステータスPublished - 2009 12 11
イベントTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
継続期間: 2009 6 212009 6 25

出版物シリーズ

名前TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
United States
Denver, CO
期間09/6/2109/6/25

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • これを引用

    Tsukamoto, T., Esashi, M., & Tanaka, S. (2009). Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactor. : TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1489-1492). [5285797] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285797