LiTaO3 recording media prepared by polarization controlled wet etching process

Yoshiomi Hiranaga, Yasuo Wagatsuma, Yasuo Cho

研究成果: Article査読

抄録

Ferroelectric single crystal thin plates with large area and high homogeneity are required for ultrahigh-density storage media. A polarization controlled wet etching process was developed in this paper. The thickness of the crystal was controlled during the wet etching process by applying DC voltage to a substrate. A 455-nm-thick LiTaO3 thin plate with a diameter of 3 mm was prepared using this method. Subsequently, nanodomains were artificially formed by applying voltage pulses to the substrate using a metal-coated cantilever top electrode. Additionally, evaluation of bit error rate was conducted using a 119-nm-thick LiTaO3 recording medium.

本文言語English
ページ(範囲)221-228
ページ数8
ジャーナルIntegrated Ferroelectrics
68
DOI
出版ステータスPublished - 2004 12 1

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 物理学および天文学(その他)
  • 凝縮系物理学
  • 電子材料、光学材料、および磁性材料

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