Light scattering by submicron particles on film-coated wafers

Hideyuki Kondo, Shigenari Yanagi, Kazushige Takaishi, Takayuki Shingyouji, Tatsuo Yoshinobu, Hiroshi Iwasaki

研究成果: Article

2 引用 (Scopus)


The intensity of light scattered by particles on film-coated wafers was measured as a function of film thickness using two types of particle counter with different optical configurations. The scattered light intensity was found to oscillate periodically with film thickness; the period of oscillation was in agreement with that of the reflectivity of the incident beam, and significant enhancement of scattering intensity was observed for thicknesses less than about 0.3 μm.

ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
発行部数5 B
出版物ステータスPublished - 1996

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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