The structure and composition of pulsed laser deposited films of (Li,La)TiO3 was related to the initial target composition and the deposition conditions. Loss of Li during both the target sintering and film growth led to films being poor in Li compared to the target. A target made from powders of composition Li1.57La0.56TiO3 produced a single phase perovskite structured film of composition Li 0.64La0.49TiO3. Films on Pt-coated Si substrates were polycrystalline and showed cracks due to thermal mismatch, while an epitaxial film on (001) SrTiO3 was tetragonally distorted withc/a=0.99 due to lattice mismatch.
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