Laser selective transfer process of barium strontium titanate (BST) on a sapphire substrate

Masayuki Fujita, Toshihiro Somekawa, Tetsuo Samoto, Hideki Hirano, Kousuke Hikichi, Shuji Tanaka, Masayoshi Esashi

研究成果: Paper査読

抄録

We have been developing the laser selective transfer techniques to transfer Barium Strontium Titanate (BST), which has excellent dielectric properties, prepared on a heat-resistant sapphire substrate to the target substrate. As a sample, Pt/BST/Au structures were made on a sapphire substrate. The laser was irradiated from the backside of the substrate, which weakens Pt/sapphire adhesion. After the laser irradiation, the substrate was separated at Pt/sapphire interface and the BST was transferred to the target substrate. In order to optimize the laser irradiation conditions, the dependences of the transfer process on laser wavelengths (1064nm and 532nm) and pulsewidths (10ns and 200ns) were investigated. After the laser irradiation, we evaluated the shape and number of the BST pixels by adhesion tape test based on ISO2409. Shorter wavelength and longer pulsewidth gave us better results of damageless laser transfer process.

本文言語English
ページ783-786
ページ数4
出版ステータスPublished - 2013 12 1
イベント32nd International Congress on Applications of Lasers and Electro-Optics, ICALEO 2013 - Miami, FL, United States
継続期間: 2013 10 62013 10 10

Other

Other32nd International Congress on Applications of Lasers and Electro-Optics, ICALEO 2013
国/地域United States
CityMiami, FL
Period13/10/613/10/10

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料

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