High-quality epitaxial GdxY1-xCa4O(B3)3 thin films were successfully fabricated on atomically flat GdCa4O(BO3)3 (010) single crystal substrates by laser molecular beam epitaxy from a sintered GdxY1-4Ca4O(BO3)3 (x = 0.28) target. It was found that the film surface morphology strongly depends on the substrate temperature and the laser repetition rate. The film crystallinity was highly dependent of substrate materials. Second-harmonic generation (SHG) was observed on the epitaxial GdxY1-xCa4O(BO3)3 films grown on GdCa4O(BO3)3 (010) substrates.
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