Large figure-of-merit epitaxial Pb(Mn,Nb)O3-Pb(Zr,Ti)O3/Si transducer for piezoelectric MEMS sensors

Hiroaki Hanzawa, Shinya Yoshida, Kiyotaka Wasa, Shuji Tanaka

    研究成果: Conference contribution

    1 被引用数 (Scopus)

    抄録

    A large figure-of-merit (FOM) piezoelectric transducer has been developed based on a Pb(Mn,Nb)O3-Pb(Zr,Ti)O3 (PMnN-PZT) epitaxial thin film on a Si substrate for MEMS (Micro Electro Mechanical Systems) sensors such as vibratory gyroscopes. A c-axis oriented PMnN-PZT thin film was epitaxially grown on a Si substrate covered with buffer layers by sputter deposition with fast cooling. This film has excellent properties of a large piezoelectric coefficient (e31,f, ∼-14 C/m2), a small dielectric constant (εr33, ∼200), and high Curie temperature (Tc, >500 °C) compared to PZT-based bulk ceramics. The calculated FOM for piezoelectric MEMS gyroscopes reached 110 GPa, which is 5 times larger than those of conventional PZT polycrystalline thin films. We believe that the epitaxial PMnN-PZT/Si transducer has a great potential for high performance piezoelectric gyroscopes.

    本文言語English
    ホスト出版物のタイトル2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
    出版社Institute of Electrical and Electronics Engineers Inc.
    ページ1338-1341
    ページ数4
    ISBN(電子版)9781479989553
    DOI
    出版ステータスPublished - 2015 8月 5
    イベント18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
    継続期間: 2015 6月 212015 6月 25

    出版物シリーズ

    名前2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

    Other

    Other18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
    国/地域United States
    CityAnchorage
    Period15/6/2115/6/25

    ASJC Scopus subject areas

    • 器械工学
    • 電子工学および電気工学

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