We studied a new method for large area imaging by Fourier transform holography in both soft and hard X-ray regions. In soft X-ray region, magnetic domain image of the perpendicular magnetized film was observed in the 8 μm area at an X-ray energy of 778eV. In hard X-ray region, the method was applied to observe both the artificially patterned sample in 7μm area and the cross-section of Cu-interconnect-line, at an X-ray energy of 5500 eV. The spatial resolution, estimated from the 10 to 90% intensity change, was 42 and 75 nm at 778 and 5500 eV, respectively.
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