Large-area and low-damage processes for hybrid flexible device fabrications with reactive high-density plasmas driven by multiple low-inductance antenna modules

Yuichi Setsuhara, Kosuke Takenaka, Ken Cho, Jeon G. Han

研究成果: Article査読

4 被引用数 (Scopus)

抄録

Plasma generation and control technologies for meters-scale ultra-large-area plasma sources have been developed with multiple low-inductance antenna (LIA) modules, as a promising candidate of ultra-large-area and high-density plasma sources for next-generation processing of hybrid flexible devices. Properties of argon-oxygen mixture plasmas sustained with multiple LIA units have been investigated and surface modifications of polymer substrates using the plasmas have been performed. Ion energy distribution at the sheath edge of the argon-oxygen mixture plasmas showed considerable suppression of ion energies as small as or less than 10 eV. We have examined effect of plasma exposure on surface modification and/or degradation of polymer. Surface analysis of polytetrafluoroethylene (PTFE) exhibited nano-surface modification of the polymer surface without suffering degradation of molecular structures beneath the nano- surface layer.

本文言語English
論文番号012042
ジャーナルJournal of Physics: Conference Series
165
DOI
出版ステータスPublished - 2009 1月 1

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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